Research Article

Global Modeling of N2O Discharges: Rate Coefficients and Comparison with ICP and Glow Discharges Results

Table 7

List of additional N2O reactions used only in the calculation.

No.ProcessDescription

1N2O + e N2O + eN2O elastic collisions
2N2O (X, ) + e N2O (X, ) + eN2O vibrational excitation 1
3N2O (X, ) + e N2O (X, ) + eN2O vibrational excitation 2
4N2O (X, ) + e N2O (X, ) + eN2O vibrational excitation 3
5N2O (X) + e N2O (A3 ) + eN2O electronic excitation to A3
6N2O (X) + e N2O (B3 ) + eN2O electronic excitation to B3
7N2O (X) + e N2O (C3 ) + eN2O electronic excitation to C3