Global Modeling of N₂O Discharges: Rate Coefficients and Comparison with ICP and Glow Discharges Results

Table 9

Additional processes involving the N₂ species (only for 𝜀_𝐶,N2 calculation).

No.	Process	Description
1	N2 + e^−→N2 + e^−	N2 elastic collisions
2	N2 (X, 𝜈=0) + e^−→N2 (X, 𝜈=6) + e^−	N2 vibrational excitation 6
3	N2 (X, 𝜈=0) + e^−→N2 (X, 𝜈=7) + e^−	N2 vibrational excitation 7
4	N2 (X, 𝜈=0) + e^−→N2 (X, 𝜈=8) + e^−	N2 vibrational excitation 8
5	N2 (X) + e^−→N2 (A) + e^−	N2 A excitation, in three parts
6	N2 (X) + e^−→N2 (B) + e^−	N2 B excitation
7	N2 (X) + e^−→N2 (W) + e^−	N2 W excitation
8	N2 (X) + e^−→N2 (B′) + e^−	N2 B′ excitation
9	N2 (X) + e^−→N2 (a′) + e^−	N2 a′ excitation
10	N2 (X) + e^−→N2 (a) + e^−	N2 a excitation
11	N2 (X) + e^−→N2 (w) + e^−	N2 w excitation
12	N2 (X) + e^−→N2 (C) + e^−	N2 C excitation
13	N2 (X) + e^−→N2 (E) + e^−	N2 E excitation
14	N2 (X) + e^−→N2 (a′′) + e^−	N2 a′′ excitation
15	N2 + e^−→N + N^+ + e^−	N2 dissociation with simple ionization
16	N2 + e^−→N^+ + N^+ + e^−	N2 dissociation with double ionization