Table 1: Antenna dimensions.

SymbolDescriptionDimensions [ m]

a Length of the coupled line 1200
b Length of the mobile electrode 1000
c Width of the mobile electrode576
d Distance between the anchor and fixed electrode 10
e Width of the coupled line50
f Width of the anchor
g Gap between the coupled line and MEMS capacitors 5
h Holes15 15
i Gap between MEMS capacitors30