Performance Investigations of Quasi-Yagi Loop and Dipole Antennas on Silicon Substrate for 94 GHz Applications

Table 1

Optimized Quasi-Yagi loop antenna prototype I dimensions.

Parameter	Quantity	Value
	Driven ellipse major radius	928 m
	Driven ellipse minor radius	430 m
	Driven ellipse thickness	72 m
	Spacing between the driven antenna and director 1	1302 m
	Director 1 ellipse major radius	480 m
	Director 1 ellipse minor radius	280 m
	Director 1 ellipse thickness	72 m
	Spacing between director 2 and director 1	802 m
	Director 2 ellipse major radius	480 m
	Director 2 ellipse minor radius	280 m
	Director 2 ellipse thickness	72 m
	Ground reflector width	302 m
	Ground reflector length	1520 m
	Substrate width	3502 m
	Substrate length	5002 m
	Matching section width	564 m
	Matching section length	268 m
	Interdigital capacitor width	294 m
	Interdigital capacitor length	1052 m
	CPW feedline width	32 m
	CPW feedline gap	27 m
	Si substrate thickness	380 m
	SiO2 layer thickness	1.2 m
	Al thickness	0.2 m