Performance Investigations of Quasi-Yagi Loop and Dipole Antennas on Silicon Substrate for 94 GHz Applications

Table 2

Optimized Quasi-Yagi dipole antenna prototype II dimensions.

Parameter	Quantity	Value
	Driven dipole length	900 m
	Driven dipole width	400 m
	Spacing between driven antenna and director 1	1476 m
	Director 1 rectangular length	700 m
	Director 1 rectangular width	550 m
	Spacing between director 1 and director 2	1000 m
	Director 2 rectangular length	700 m
	Director 2 rectangular width	550 m
	Ground reflector width	300 m
	Ground reflector length	1520 m
	Substrate width	3500 m
	Substrate length	5000 m
	Matching section width	560 m
	Matching section length	250 m
	Interdigital capacitor width	290 m
	Interdigital capacitor length	1040 m
	CPW feedline width	30 m
	CPW feedline gap	25 m
	Si substrate thickness	380 m
	SiO2 layer thickness	1.2 m
	Al thickness	0.2 m