Fabrication of a 77 GHz Rotman Lens on a High Resistivity Silicon Wafer Using Lift-Off Process

<table>(a) Beam to array coupling amplitude, (b) beam to array coupling phase.</table>

International Journal of Antennas and Propagation

Figure 4: Fabrication of a 77 GHz Rotman Lens on a High Resistivity Silicon Wafer Using Lift-Off Process 