Fabrication of a 77 GHz Rotman Lens on a High Resistivity Silicon Wafer Using Lift-Off Process

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</svg>-parameter for beam port number one active, (a) magnitude, (b) phase.</table>

International Journal of Antennas and Propagation

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Figure 7

Figure 7: Fabrication of a 77 GHz Rotman Lens on a High Resistivity Silicon Wafer Using Lift-Off Process 