On-Chip Antenna Design Using the Concepts of Metamaterial and SIW Principles Applicable to Terahertz Integrated Circuits Operating over 0.6–0.622 THz

Table 1

Structural parameters of the proposed on-chip antenna-inspired SIW and MTM properties.

On-chip antenna dimensions	1000 × 1000 × 100 μm^3
Ground plane	1000 × 1000 μm^2
Radiation patches dimensions	300 × 300 μm^2
Polyimide substrates thickness	50 m
Length variations of the slots etched on the patches	60 m L200 μm
Width of the slots etched on the patches	20 μm
Length of the lines connecting the patches	200 μm
Width of the lines connecting the patches	20 μm
Radius of the metallic via-holes	10 μm
Distance between the metallic via-holes	5 μm
Length of each side of the square slot etched on the ground plane	520 μm
Width of the square slot etched on the ground plane	20 μm
Width of the feed line	20 μm