Experimental and Computational Analysis of Broadband THz Photoconductive Antennas

Figure 5

Circular PCA: (a) problematic uniform dosage, (b) PEC corrected CAD model, and (c) modulated dosage. These images were taken using an optical microscope. The difference in colors between 5(a) and 5(c) is due to the PMMA resist in 5(a) and the Cr/Au metallization in 5(c).

(a)

(b)

(c)