Magnetron Sputtered NbN Films with Nb Interlayer on Mild Steel

Table 1

Deposition parameters for Nb and NbN coatings.

Parameter	Value
Base pressure	2×10^−6 mbar
Operating pressure	5×10^−3 mbar
Argon gas flow rate	20 sccm
Nitrogen gas flow rate	0–14 sccm
Substrate biasing	0 to −150 V
Target current NbN/Nb	0.25/0.3 Ampere
Target-substrate distance	~60 mm