Effect of C/Si Ratio on the Electrochemical Behavior of a-SiCx:H Coatings on SS301 Substrate Deposited by PECVD
Figure 2
(a) Cross-sectional SEM image of a-SiC1.02:H coating; (b) SEM images of (b1) a-SiC0.59:H, (b2) a-SiC0.75:H, (b3) a-SiC0.89:H, and (b4) a-SiC1.02:H coatings.