International Journal of Chemical Engineering / 2012 / Article / Fig 12

Research Article

Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility

Figure 12

EPMA photographs of the CaCO3 adsorbents before and after experiments.
329419.fig.0012a
(a) Before reaction
329419.fig.0012b
(b) During reaction
329419.fig.0012c
(c) After reaction