International Journal of Chemical Engineering / 2012 / Article / Fig 9

Research Article

Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility

Figure 9

Plots of (dX/dt)−1 · versus (1−X)−1/3−1.
329419.fig.009a
(a) Grain size: 1-2 mm
329419.fig.009b
(b) Grain size: 2–5 mm