Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility

<table class="table-group" width="800px"><tr class="fig-image" id="a"><td><img alt="329419.fig.009a" src="https://static.hindawi.com/articles/ijce/volume-2012/329419/figures/329419.fig.009a.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(a) </b>Grain size: 1-2 mm</td></tr></table></td></tr><tr class="fig-image" id="b"><td><img alt="329419.fig.009b" src="https://static.hindawi.com/articles/ijce/volume-2012/329419/figures/329419.fig.009b.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(b) </b>Grain size: 2–5 mm</td></tr></table></td></tr></table>

<table>Plots of (<i>dX</i>/<i>dt</i>)<sup>−1</sup> · <svg height="15.5375" id="M28" style="vertical-align:-3.276pt" version="1.1" viewbox="0 0 28.137501 15.5375" width="28.137501" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,0,0,-.017,.062,11.4)"><path d="M682 629q-1 -16 -1.5 -72t-2.5 -86l-31 -4q-5 92 -51 129t-139 37q-100 0 -177 -49t-116 -125t-39 -162q0 -122 66 -201t182 -79q83 0 137 42.5t112 128.5l26 -15q-12 -31 -42.5 -88t-45.5 -75q-139 -27 -199 -27q-148 0 -243 81.5t-95 226.5q0 173 129.5 274.5
t325.5 101.5q114 0 204 -38z" id="x1D436"></path></g>
<g transform="matrix(.012,0,0,-.012,12.05,15.475)"><path d="M729 650v-28q-62 -5 -76 -19.5t-14 -75.5v-404q0 -62 13.5 -76t75.5 -19v-28h-268v28q65 5 79.5 19t14.5 76v199h-341v-199q0 -62 14 -76t76 -19v-28h-263v28q61 5 74.5 19t13.5 76v404q0 62 -14 76t-76 19v28h259v-28q-58 -5 -71 -19t-13 -76v-162h341v162
q0 61 -13.5 75.5t-72.5 19.5v28h261z" id="x48"></path></g><g transform="matrix(.012,0,0,-.012,21.164,15.475)"><path d="M493 503l-29 -4q-13 56 -28 80q-13 22 -35.5 29.5t-78.5 7.5h-76q-22 0 -27.5 -5t-5.5 -27v-238h103q66 0 82.5 12t25.5 62h29v-193h-29q-9 54 -25.5 67t-82.5 13h-103v-181q0 -64 15 -78.5t84 -19.5v-28h-272v28q61 5 74.5 19.5t13.5 78.5v399q0 64 -13 78t-72 19v28
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</svg> versus (1−<i>X</i>)<sup>−1/3</sup>−1.</table>

International Journal of Chemical Engineering

fig9

Figure 9

Figure 9: Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility 