International Journal of Chemical Engineering / 2012 / Article / Tab 1

Research Article

Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility

Table 1

Experimental conditions for the gas-solid reaction.

Practical systemExperimental conditions

Processing flow rate400 L/min1.6 L/min
Inner diameter45 cm2.8 cm
Superficial velocity6 cm/s6 cm/s
L/D ratio1.21.2
CaCO3 weight120 kg31 g
Space velocity (SV)400 h−16700 h−1
Adsorbent size1~2 mm, 2~5 mm1~2 mm, 2~5 mm
Fixation temperature150°C150°C