International Journal of Chemical Engineering / 2012 / Article / Tab 4

Research Article

Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility

Table 4

Experimental conditions of the fixed-bed furnace.

WTVL L/D v SV
g °Ccm3cmcm/sh−1

NaHCO3 or NaF1215010.41.680.6011.725066