International Journal of Electrochemistry

Research Article

Online Monitoring of Copper Damascene Electroplating Bath by Voltammetry: Selection of Variables for Multiblock and Hierarchical Chemometric Analysis of Voltammetric Data

Table 5

Extreme values of parameters calculated for individually selected ranges of points of staircase voltammogram, variables , (Table 4) using UVE-PLS, UVE-PCR, PLS-VIP, IPLS, IPCR, and MWPLS for .


Data range index, k	Range of voltammogram/ variables j	UVE-PLS Min Abs(c)	UVE-PCR Min Abs(c)	Min PLS-VIP	IPLS Max RMSECV	IPCR Max RMSECV	MWPLS Max RMSECV

	1401–1430	615	606	1.47	.350	.350	.313
	1478–1496	331	334	1.47	.356	.357	.334
	1785–1826	424	423	1.47	.245	.245	.268
	1871–1888	281	281	1.47	.274	.275	.301
	2173–2219	335	334	1.47	.224	.225	.237
	2263–2279	250	251	1.47	.276	.278	.276
	2563–2612	285	285	1.48	.286	.286	.213
	2655–2670	231	232	1.48	.327	.328	.252
	2955–3002	237	241	1.48	.131	.131	.174
	3048–3062	225	227	1.47	.221	.223	.232
	3345–3395	230	230	1.49	.162	.162	.162
	3441–3454	224	226	1.47	.227	.229	.214
	3735–3786	222	222	1.49	.237	.237	.142
	3834–3846	225	226	1.47	.317	.317	.198