Electrostatic MEMS OCT from UC-Irvine/UC-Berkeley. (a) SEMs of two MEMS mirrors, (b) Electrical connection through wire bonding, (c) packaged MEMS probe, (d) 3D image of rabbit rectal tissue.
(b) Reprinted with permission from (W. Jung, et al; “Three-dimensional endoscopic optical coherence tomography by use of a two-axis microelectromechanical scanning mirror,” Applied Physics Letters, vol. 88-163901, pp. 1–3, 2006). Copyright (2006), American Institute of Physics
