Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range

<table>Comparison tests between tilted and nontilted reference methods. (a) Independent nontilted reference and  nontilted sample. (b) Nontilted reference of second OH and nontilted sample. (c) Tilted reference and nontilted sample.</table>

International Journal of Optics

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Figure 10

Figure 10: Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range 

Figure 10 | Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range 