Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range

<table>Results of slope measurement of  the PBS produced by Rainbow Research Optics Inc., USA, tested  at 0°, 90°, and 180° positions.</table>

International Journal of Optics

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Figure 5

Figure 5: Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range 

Figure 5 | Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range 