Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range

<table>Results of slope measurement of the PBS produced in China, tested at 0° and 90° positions. At each position,  it is scanned three  3 times.</table>

International Journal of Optics

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Figure 6

Figure 6: Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range 

Figure 6 | Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range 