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International Journal of Optics
Volume 2011, Article ID 902158, 9 pages
http://dx.doi.org/10.1155/2011/902158
Research Article

Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range

Instrumentation Division, Brookhaven National Laboratory, Upton, NY 11973, USA

Received 12 October 2010; Accepted 28 March 2011

Academic Editor: Wolfgang Osten

Copyright © 2011 Shinan Qian. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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