Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range

<table class="table-group" id="tab1"><tr><td><table class="table"><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr class="thead"><td align="left">Years</td><td align="center">Slope error requirement of mirrors</td><td align="center">Required focusing spot size</td></tr><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr><td align="left">1980s</td><td align="center">5 <i>μ</i>rad</td><td align="center">10 <i>μ</i>m</td></tr><tr><td align="left">1990s</td><td align="center">1 <i>μ</i>rad</td><td align="center">1 <i>μ</i>m</td></tr><tr><td align="left">NSLS II/TPS and new NSP</td><td align="center">100 nrad</td><td align="center"> 1 nm</td></tr><tr class="table-tr"><td colspan="3"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Different requirements for the  slope error of mirrors and the focusing-spot size at  different  times.

International Journal of Optics

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Table 1

Table 1: Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range 

Table 1 | Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range 