Research Article
Tuning Metamaterials for Applications at DUV Wavelengths
Table 1
Joined data in MySQL.
| | Layer ID | Layers | Metal thick (nm) | Metal count | Dielectric thick (nm) | Dielectric count | Angle (deg) | Reflectance | Beta |
| | 15127 | 3 | 5 | 2 | 28 | 1 | 87.51 | 0.0042 | 50738563 | | 15156 | 3 | 5 | 2 | 29 | 1 | 87.51 | 0.0682 | 50738563 | | 15098 | 3 | 5 | 2 | 27 | 1 | 87.02 | 0.1021 | 50717534 | | 15185 | 3 | 5 | 2 | 30 | 1 | 87.02 | 0.2338 | 50717534 | | 17574 | 3 | 6 | 2 | 27 | 1 | 87.02 | 0.0072 | 50717534 | | 17551 | 3 | 6 | 2 | 26 | 1 | 86.52 | 0.0358 | 50692685 | | 17597 | 3 | 6 | 2 | 28 | 1 | 86.52 | 0.1171 | 50692685 | | 15214 | 3 | 5 | 2 | 31 | 1 | 86.02 | 0.3819 | 50664018 | | 15069 | 3 | 5 | 2 | 26 | 1 | 85.52 | 0.2362 | 50631535 | | 17620 | 3 | 6 | 2 | 29 | 1 | 85.52 | 0.2723 | 50631535 | | 19837 | 3 | 7 | 2 | 26 | 1 | 85.52 | 0.0034 | 50631535 | | 19856 | 3 | 7 | 2 | 27 | 1 | 85.52 | 0.0898 | 50631535 | | 15243 | 3 | 5 | 2 | 32 | 1 | 85.03 | 0.4932 | 50595239 | | 17528 | 3 | 6 | 2 | 25 | 1 | 85.03 | 0.1433 | 50595239 | | 19818 | 3 | 7 | 2 | 25 | 1 | 85.03 | 0.0348 | 50595239 | | 17643 | 3 | 6 | 2 | 30 | 1 | 84.53 | 0.4044 | 50555133 | | 19875 | 3 | 7 | 2 | 28 | 1 | 84.53 | 0.2368 | 50555133 | | 21971 | 3 | 8 | 2 | 26 | 1 | 84.53 | 0.0294 | 50555133 | | 15040 | 3 | 5 | 2 | 25 | 1 | 84.03 | 0.3425 | 50511218 | | 15272 | 3 | 5 | 2 | 33 | 1 | 84.03 | 0.5753 | 50511218 | | 21954 | 3 | 8 | 2 | 25 | 1 | 84.03 | 0.0040 | 50511218 | | 21988 | 3 | 8 | 2 | 27 | 1 | 84.03 | 0.1495 | 50511218 | | 15301 | 3 | 5 | 2 | 34 | 1 | 83.54 | 0.6369 | 50463500 | | 17666 | 3 | 6 | 2 | 31 | 1 | 83.54 | 0.5052 | 50463500 | | 19894 | 3 | 7 | 2 | 29 | 1 | 83.54 | 0.3722 | 50463500 | | 17505 | 3 | 6 | 2 | 24 | 1 | 83.04 | 0.2461 | 50411980 | | 22005 | 3 | 8 | 2 | 28 | 1 | 83.04 | 0.2939 | 50411980 | | 23936 | 3 | 9 | 2 | 26 | 1 | 83.04 | 0.0465 | 50411980 | | 15330 | 3 | 5 | 2 | 35 | 1 | 82.54 | 0.6840 | 50356665 | | 17689 | 3 | 6 | 2 | 32 | 1 | 82.54 | 0.5813 | 50356665 |
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