Analysis of the Noise Reduction Characteristics of a Diffuser with Fizeau Interferometry

Table 1

Diffuser with different surface roughnesses.

	Designed RMS roughness (nm)	Actual RMS roughness (nm)	Error (nm)
0.2	126.56	135.9	9.34
0.3	189.84	199.8	9.96
0.35	221.48	216.7	−4.83
0.4	253.12	244.4	−8.7
0.47	297.4	300.3	2.9
0.5	316.4	305.1	−11.3
0.6	379.68	390.3	10.62
0.7	442.96	458.7	15.74