Review Article

Research Progress of Stress Measurement Technologies for Optical Elements

Table 1

Comparison between different methods.

MethodKey equipmentAdvantageDisadvantageStress precision

DPPolarization camera, image sensorAutomatic, high resolutionComplexity, Inflexibility184 kPa (4 nm/cm)
PEMPhotoelastic modulatorHigh sensitivity, high speed, good stabilityLimited measurement range0.2 kPa (0.008 nm/cm)
LDVLaser Doppler vibrometerHigh sensitivity, good visualization, good stabilityInability to detect the shear wave directly0.036 Pa
LSILaser self-mixing interferometerSimple, low cost, wide rangeLimited measurement accuracy0.152 nm/cm
LFILaser feedback interferometerSimple, low costLimited measurement accuracy19 nm/cm
CRDLight source, optical resonatorHigh sensitivity, wide rangeLow engineering applicability0.03 kPa (12 × 10−4 nm/cm)