Analysis of the Spatial-Frequency Characteristics of the Photo-Assisted Method of a Quartz Rough Surface Nano-Polishing

Figure 1

The 2D cell used to calculate evanescent field parameters in the near-field region of the nanoirregularities of the quartz surface. Regions 1, 2, 3, and 4 are, respectively, the regions of the upper absorbing layer, the quartz layer, the chlorine gas layer, and the lower absorbing layer.