Analysis of the Spatial-Frequency Characteristics of the Photo-Assisted Method of a Quartz Rough Surface Nano-Polishing

Figure 2

Distributions of the modulus of the electric field along the “quartz-chlorine gas” interface, which has a sinusoidal profile with spatial frequencies (a) and (b) at different angles of the incident wave: (curve 1 corresponds to  nm and curve 2 corresponds to  nm); (curve 3 corresponds to  nm and curve 4 corresponds to  nm), (curve 5 corresponds to  nm and curve 6 corresponds to  nm). The wavelength of the incident radiation (in vacuum) is  nm. The protrusion height of the sinusoidal profile is  nm (curve 7).

(a)

(b)