Analysis of the Spatial-Frequency Characteristics of the Photo-Assisted Method of a Quartz Rough Surface Nano-Polishing

Figure 5

The module of the spatial spectrum functions for the random surface profiles characterized by a Gaussian correlation function with a correlation length of σ = 14.2 nm (curve 1), σ = 23.7 nm (curve 2), and σ = 33.1 nm (curve 3).