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International Journal of Photoenergy
Volume 2007 (2007), Article ID 95213, 5 pages
Research Article

Effect of Substrate Sodium Content on Crystallization and Photocatalytic Activity of TiO2 Films Prepared by DC Magnetron Sputtering

1Department of Ceramics and Joints, Institute of Electronic Materials Technology, 133 Wolczynska, Warsaw 01-919, Poland
2Department of Solid State Sciences, Ghent University, Krijgslaan 281, Gent 9000, Belgium
3Department of Chemical Engineering, Ghent University, Krijgslaan 281, Gent 9000, Belgium

Received 11 July 2006; Revised 20 October 2006; Accepted 24 October 2006

Academic Editor: Jimmy C. Yu

Copyright © 2007 Henryk Tomaszewski et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


The effect of sodium content of the glass support on the crystallinity of sputtered TiO2 films and photocatalytic breakdown of ethanol has been studied. It was found that the activity of the as-deposited (amorphous) films does not depend on the type of support used. The chemical composition of the glass support does influence the activity of annealed films. When using soda-lime glass support sodium diffuses into the film upon annealing, suppressing anatase crystallization and decreasing its photocatalytic activity. To decrease the influence of sodium, soda-lime glass coated with an e-beam evaporated SiO2 barrier layer was used with good result. A reduced sodium concentration in the film leads to well crystallized anatase after annealing. An increased photocatalytic activity was observed for these films.