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International Journal of Photoenergy
Volume 2012 (2012), Article ID 197514, 7 pages
Research Article

High-Efficiency 6′′ Multicrystalline Black Solar Cells Based on Metal-Nanoparticle-Assisted Chemical Etching

1Institute of Nanoengineering and Microsystems, National Tsing-Hua University, Hsinchu 30013, Taiwan
2Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, USA
3Sino-American Silicon Products Inc., Hsinchu 30077, Taiwan

Received 31 August 2011; Accepted 30 December 2011

Academic Editor: Junsin Yi

Copyright © 2012 W. Chuck Hsu et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Multicrystalline silicon (mc-Si) photovoltaic (PV) solar cells with nanoscale surface texturing by metal-nanoparticle-assisted etching are proposed to achieve high power efficiency. The investigation of average nanorod lengths from 100 nm to 1 μm reveals that the Si wafer decorated with 100 nm thick nanorods has optical reflection of 9.5% inferior than the one with 1 μm thick nanorods (2%). However, the short nanorods improve the doping uniformity and effectively decrease metal contact resistance. After surface passivation using the hydrogenated SiO2/SiNx (5 nm/50 nm) stack, the minority carrier lifetime substantially increases from 1.8 to 7.2 μs for the 100 nm-thick nanorod solar cell to achieve the high power efficiency of 16.38%, compared with 1 μm thick nanorod solar cell with 11.87%.