17.6% Conversion Efficiency Multicrystalline Silicon Solar Cells Using the Reactive Ion Etching with the Damage Removal Etching

Figure 2

SEM images of textured surfaces: (a) acid textured surface 5000x, (b) RIE-textured surface 5000x, (c) acid textured surface 30000x, and (d) RIE-textured surface 30000x.

(a)

(b)

(c)

(d)