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International Journal of Photoenergy
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International Journal of Photoenergy
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2012
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Article
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Tab 1
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Research Article
High-Efficiency Si Solar Cell Fabricated by Ion Implantation and Inline Backside Rounding Process
Table 1
The
% comparison of different etching depths.
ā
ED0
ED3
ED6
ED9
%
14.54
14.71
14.88
14.95