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International Journal of Photoenergy
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International Journal of Photoenergy
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2012
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Article
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Fig 3
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Research Article
Gas Nozzle Effect on the Deposition of Polysilicon by Monosilane Siemens Reactor
Figure 3
Simulation analysis of (a) SiH
4
mass fraction and (b) silicon deposition rate between type A and B nozzle.
(a)
(b)