International Journal of Photoenergy

Research Article

TiO₂:(Fe, S) Thin Films Prepared from Complex Precursors by CVD, Physical Chemical Properties, and Photocatalysis

Table 1

Typical conditions of TiO₂ thin film synthesis.


Sample	Precursor	Substrate	Thickness, nm	, °C	, mbar	, MOhm	Flux, %

1	Ti(dpm)₂(Oprⁱ)₂	Glass	250	540	1.2 · 10⁻⁴		Vacuum
2		Quartz	250	450	1.4 · 10⁻⁴		Vacuum
3		Quartz	150	500	2.4 · 10⁻⁵		Vacuum
4		Quartz	295	550	1.6 · 10⁻⁴		Vacuum
5		Quartz	300	600	4.0 · 10⁻⁴		Vacuum
9		Glass	150	450	1.4 · 10⁻¹	>200	50/100
10		Glass	215	450	1.4 · 10⁻¹	>200	50/100
18		Ceramic	165	465	1.1 · 10⁻⁴		Vacuum

23	TTIP	Quartz	55	450	2.1 · 10⁻¹	>200	100/0
24		Quartz	485	450	6.4 · 10⁻⁵	>200	Vacuum
26		Glass	250	400	1.2 · 10⁻⁴		Vacuum
30		Glass	1745	400	2.1 · 10⁻¹	>200	50/100
31		Glass	970	450	3.7 · 10⁻¹	>200	50/100

65	TTIP + FeDtc (0.008 g)	Glass	970	450	1.5 · 10⁻¹	>200	50/100
66	TTIP + TBDS	Glass	970	400	1.5 · 10⁻¹		50/100
72	TTIP + FeDtc (0.008 g)	Glass	890	400	1.1 · 10⁻¹		50/100
73	TTIP + FeDtc (0.008 g)	Quartz	800	400	1.1 · 10⁻¹		50/100
74	TTIP + FeDtc (0.016 g)	Glass	803	400	1.0 · 10⁻¹		50/100
75	TTIP + FeDtc (0.016 g)	Quartz	918	400	1.0 · 10⁻¹		50/100
76	TTIP + FeDtc (0.032 g)	Glass	516	400	1.1 · 10⁻¹		50/100
77	TTIP + FeDtc (0.032 g)	Quartz	593	400	1.1 · 10⁻¹		50/100
79	TTIP + FeDtc (0.008 g)	Quartz	1045	400	1.0 · 10⁻¹		50/100
80	TTIP + FeDtc (0.016 g)	Glass	560	400	1.0 · 10⁻¹		50/100
81	TTIP + FeDtc (0.016 g)	Quartz	580	400	1.0 · 10⁻¹		50/100
83	TTIP + FeDtc (0.032 g)	Quartz	760	400	1.0 · 10⁻¹		50/100
85	TTIP + FeDtc (0.064 g)	Quartz	480	400	1.1 · 10⁻¹		50/100
86	TTIP + FeDtc (0.3 g)	Glass	147	400	1.1 · 10⁻¹		50/100
87	TTIP + FeDtc (0.3 g)	Quartz	145	400	1.1 · 10⁻¹		50/100

*100% Flux of Ar and oxygen correspond to 20 mL/min at normal pressure.