Research Article
TiO2:(Fe, S) Thin Films Prepared from Complex Precursors by CVD, Physical Chemical Properties, and Photocatalysis
Table 2
The results of mass-spectrometry analysis; the values are shown in %. n/d: not detected; the detectability threshold is given in brackets.
| | Impurity | Sample 1 | Sample 2 | Sample 3 | Sample 4 | Sample 5 |
| | C | ≈5 · 10−1 | ≈5 · 10−1 | ≈5 · 10−1 | ≈5 · 10−1 | ≈5 · 10−1 | | N | ≤2 · 10−2 | ≤2 · 10−2 | ≤2 · 10−2 | ≤4 · 10−2 | ≤4 · 10−2 | | Na | <2 · 10−1 | <2 · 10−1 | <2 · 10−1 | <2 · 10−1 | <2 · 10−1 | | Mg | <1 · 10−2 | <1 · 10−2 | <1 · 10−2 | <1 · 10−2 | <1 · 10−2 | | Al | 5 · 10−3 | 3 · 10−2 | 7 · 10−3 | 4 · 10−3 | 1 · 10−2 | | P | 3 · 10−3 | 3 · 10−3 | 3 · 10−3 | 1 · 10−3 | 2 · 10−3 | | Cl | 1 · 10−2 | 5 · 10−2 | 1 · 10−2 | 7 · 10−3 | 4 · 10−2 | | K | 2 · 10−1 | 4 · 10−2 | 2 · 10−2 | 1 · 10−2 | 2 · 10−2 | | Ca | 7 · 10−2 | 1 · 10−1 | 3 · 10−2 | 8 · 10−2 | 8 · 10−2 | | Cr | 1 · 10−3 | 7 · 10−4 | 5 · 10−4 | 1 · 10−3 | 5 · 10−3 | | Mn | 6 · 10−4 | 1 · 10−3 | 9 · 10−4 | 3 · 10−4 | 1 · 10−3 | | Fe | 1 · 10−2 | 3 · 10−1 | 2 · 10−1 | 1 · 10−1 | 1 · 10−1 | | Co | n/d (6 · 10−4) | n/d (6 · 10−4) | n/d (6 · 10−4) | n/d (6 · 10−4) | n/d (6 · 10−4) | | Ni | 2 · 10−3 | 8 · 10−4 | n/d (6 · 10−4) | n/d (6 · 10−4) | 5 · 10−3 | | Cu | 3 · 10−3 | 4 · 10−1 | 2 · 10−1 | 1 · 10−1 | 1 · 10−1 | | Zn | 3 · 10−2 | 4 · 10−2 | 1 · 10−1 | 2 · 10−2 | 5 · 10−2 |
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