Impedance Spectroscopic Study of p-i-n Type a-Si Solar Cell by Doping Variation of p-Type Layer

Table 2

Deposition condition of solar cell layers.

Layer	Gas ratio				Thickness (nm)	Power density (mW/cm^2)	Temp. (°C)	Pressure (mTorr)
	SiH4	H2	B2H6	PH3
p	1	5	0.05~0.5		15	50	175	200
i	1	1			350	42	180	200
n	1	5		1	25	70	200	200