Silicon Nanoscale Materials: From Theoretical Simulations to Photonic Applications
Figure 10
(a) Si nanocluster mean radius obtained from EFTEM images, (b) crystalline fraction obtained from the comparison of EFTEM and DFTEM images, and (c) density of amorphous (na) and crystalline (nc) nanoclusters, as a function of the annealing temperature. The lines are drawn to guide the eye.
