p-Type Quasi-Mono Silicon Solar Cell Fabricated by Ion Implantation

Table 4

The results of SiO₂ thickness and uniformity.

	POCl3	Anneal_900	Anneal_870	Anneal_840	Anneal_810
SiO2 thickness (nm)	x	17.63	17.56	17.21	17.02
Uniformity (%)	x	0.81%	0.92%	1.05%	1.21%