Research Article

A Reuse Evaluation for Solar-Cell Silicon Wafers via Shift Revolution and Tool Rotation Using Magnetic Assistance in Ultrasonic Electrochemical Micromachining

Figure 3

Geometry of the designed tool.
293859.fig.003a
(a) Configuration of tool module with rotation and revolution
293859.fig.003b
(b) Configuration of designed tool and workpiece (silicon wafers of solar cells)