The Effect of Sputtering Parameters on the Film Properties of Molybdenum Back Contact for CIGS Solar Cells

Table 5

Sputtering parameters for the Mo bilayer and the resultant characteristics.

		dc power 400 W, soda lime glass substrate temperature 200°C
Sample	Mo bilayer	Pressure (mTorr)	Thickness (nm)	Resistivity (Ω-cm)	Reflectance (%)	Adhesion (fail/pass)
1	1st layer	13	100	1.79×10^−5	58.80	pass
	2nd layer	3	900
2	1st layer	13	200	1.87×10^−5	57.03	pass
	2nd layer	3	800
3	1st layer	13	300	1.99×10^−5	56.82	pass
	2nd layer	3	700
4	1st layer	13	400	2.52×10^−5	55.61	pass
	2nd layer	3	600
5	1st layer	13	500	3.26×10^−5	55.40	pass
	2nd layer	3	500