Fabrication of High Transparency Diamond-Like Carbon Film Coating on D263T Glass at Room Temperature as an Antireflection Layer
Figure 2
XPS survey spectrum (a) and the deconvolution of the C1s binding energy peak of the XPS spectrum of the DLC films; (b) DLC film (specimen GD 9) deposited under a sputtering power of 200 W, work distance of 10 cm, working pressure of 3 mTorr, and deposition time of 0.5 h. (c) DLC film (specimen GD 6) deposited under the sputtering power of 175 W, work distance of 10 cm, working pressure of 1 mTorr, and deposition time of 1 h. (d) DLC film (specimen GD 3) deposited under the sputtering power of 150 W, work distance of 10 cm, working pressure of 5 mTorr, and deposition time of 2 h.
