Research Article

Fabrication of High Transparency Diamond-Like Carbon Film Coating on D263T Glass at Room Temperature as an Antireflection Layer

Figure 3

SEM images of DLC film are deposited on D263T glass substrate at room temperature by using RF magnetron sputtering technique. (a) SEM images of DLC film deposited referred to the specimen GD 9. (b) SEM images of DLC film deposited referred to the specimen GD 6. (c) SEM images of DLC film deposited referred to the specimen GD 3, and (d) the cross-section view shows the corresponding for image (c), which is 30 nm thick DLC film.
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612163.fig.003b
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(c)
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(d)