Table of Contents Author Guidelines Submit a Manuscript
International Journal of Photoenergy
Volume 2013, Article ID 612163, 8 pages
http://dx.doi.org/10.1155/2013/612163
Research Article

Fabrication of High Transparency Diamond-Like Carbon Film Coating on D263T Glass at Room Temperature as an Antireflection Layer

1Institute of Mechatronic Engineering, National Taipei University of Technology, Taipei 10608, Taiwan
2College of Mechanical and Electrical Engineering, National Taipei University of Technology, Taipei 10608, Taiwan
3Graduate College of Mechanical and Electrical Engineering, National Taipei University of Technology, Taipei 10608, Taiwan

Received 7 December 2012; Revised 28 January 2013; Accepted 1 February 2013

Academic Editor: Ho Chang

Copyright © 2013 Chii-Ruey Lin et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. R.-H. Horng, W.-C. Kao, S.-L. Ou, and D.-S. Wuu, “Effect of diamond like carbon layer on heat dissipation and optoelectronic performance of vertical-type InGaN light emitting diodes,” Applied Physics Letters, vol. 101, no. 17, Article ID 171102, 2012. View at Google Scholar
  2. J. Wang, F. Liu, H. Chen, and D. Chen, “Superhydrophobic behavior achieved from hydrophilic surfaces,” Applied Physics Letters, vol. 95, no. 8, Article ID 084104, 2009. View at Publisher · View at Google Scholar · View at Scopus
  3. C. R. Lin, C. H. Su, P. S. Fan, and K. L. Wang, “Application of nitrified steel deposit diamond-like carbon film in explosive environment,” Japanese Journal of Applied Physics, vol. 47, no. 4, pp. 2221–2224, 2008. View at Publisher · View at Google Scholar · View at Scopus
  4. J. A. Johnson, J. B. Woodford, D. Rajput et al., “Carbon-hydrogen bonding in near-frictionless carbon,” Applied Physics Letters, vol. 93, no. 13, Article ID 131911, 2008. View at Google Scholar
  5. T. Patrusheva, V. Letunovsky, L. Gorjacheva, A. Gorschkov, V. Sergienko, and E. Jakovleva, “Protective coatings from ultra fine diamond,” Carbon, vol. 40, no. 1, pp. 125–129, 2002. View at Publisher · View at Google Scholar · View at Scopus
  6. C. R. Lin, D. H. Wei, C. K. Chang, W. H. Liao, and K. Ran Peng, “Diamond-like carbon films deposited at room temperature on flexible plastics substrates for antireflection coating,” Japanese Journal of Applied Physics, vol. 50, no. 3, Article ID 035802, 2011. View at Publisher · View at Google Scholar · View at Scopus
  7. S. Sahoo, S. S. Pradhan, V. Bhavanasi, and S. K. Pradhan, “Structural and mechanical characterization of diamond like carbon films grown by microwave plasma CVD,” Surface and Coatings Technology, vol. 204, no. 16-17, pp. 2817–2821, 2010. View at Publisher · View at Google Scholar · View at Scopus
  8. S. B. Singh, M. Pandey, N. Chand et al., “Optical and mechanical properties of diamond like carbon films deposited by microwave ECR plasma CVD,” Bulletin of Materials Science, vol. 31, no. 5, pp. 813–818, 2008. View at Publisher · View at Google Scholar · View at Scopus
  9. W. S. Choi, K. Kim, J. Yi, and B. Hong, “Diamond-like carbon protective anti-reflection coating for Si solar cell,” Materials Letters, vol. 62, no. 4-5, pp. 577–580, 2008. View at Publisher · View at Google Scholar · View at Scopus
  10. C. H. Su, C. R. Lin, C. Y. Chang, H. C. Hung, and T. Y. Lin, “Mechanical and optical properties of diamond-like carbon thin films deposited by low temperature process,” Thin Solid Films, vol. 498, no. 1-2, pp. 220–223, 2006. View at Publisher · View at Google Scholar · View at Scopus
  11. J. Robertson, “Properties of diamond-like carbon,” Surface and Coatings Technology, vol. 50, no. 3, pp. 185–203, 1992. View at Google Scholar · View at Scopus
  12. V. M. Aroutiounian, K. Martirosyan, and P. Soukiassian, “Low reflectance of diamond-like carbon/porous silicon double layer antireflection coating for silicon solar cells,” Journal of Physics D, vol. 37, no. 19, pp. L25–L28, 2004. View at Publisher · View at Google Scholar · View at Scopus
  13. Y. Hayashi, S. Ishikawa, T. Soga, M. Umeno, and T. Jimbo, “Photovoltaic characteristics of boron-doped hydrogenated amorphous carbon on n-Si substrate prepared by r.f. plasma-enhanced CVD using trimethylboron,” Diamond and Related Materials, vol. 12, no. 3–7, pp. 687–690, 2003. View at Publisher · View at Google Scholar · View at Scopus
  14. W.-H. Liao, C. -R. Lin, D.-H. Wei et al., “Concurrent improvement in biocompatibility and bioinertness of diamond-like carbon films with nitrogen doping,” Journal of Biomedical Materials Research Part A, vol. 100, no. 11, pp. 3151–3156, 2012. View at Google Scholar
  15. Y. Lifshitz, G. D. Lempert, E. Grossman et al., “Optical and photoemission studies of DLC films prepared with a systematic variation of the sp3:sp2 composition,” Diamond and Related Materials, vol. 6, no. 5–7, pp. 687–693, 1997. View at Google Scholar · View at Scopus
  16. M. Smietana, W. J. Bock, J. Szmidt, and J. Grabarczyk, “Substrate effect on the optical properties and thickness of diamond-like carbon films deposited by the RF PACVD method,” Diamond and Related Materials, vol. 19, no. 12, pp. 1461–1465, 2010. View at Publisher · View at Google Scholar · View at Scopus
  17. M. H. Oliveira, D. S. Silva, A. D. S. Côrtes, M. A. B. Namani, and F. C. Marques, “Diamond like carbon used as antireflective coating on crystalline silicon solar cells,” Diamond and Related Materials, vol. 18, no. 5–8, pp. 1028–1030, 2009. View at Publisher · View at Google Scholar · View at Scopus
  18. Y.-S. Yang and W. Huang, “A grey-fuzzy Taguchi approach for optimizing multi-objective properties of zirconium-containing diamond-like carbon coatings,” Expert Systems with Applications, vol. 39, no. 1, pp. 743–750, 2012. View at Google Scholar
  19. M. Hamidi, A. Azadi, H. Ashrafi, P. Rafiei, and S. Mohamadi-Samani, “Taguchi orthogonal array design for the optimization of hydrogel nanoparticles for the intravenous delivery of small-molecule drugs,” Journal of Applied Polymer Science, vol. 126, no. 5, pp. 1714–1724, 2012. View at Google Scholar
  20. A. Czyzniewski, “Optimising deposition parameters of W-DLC coatings for tool materials of high speed steel and cemented carbide,” Vacuum, vol. 86, no. 12, pp. 2140–2147, 2012. View at Google Scholar
  21. A. H. Tan and Y. C. Cheng, “Optimization of wear-corrosion properties of a-C:N films using filtered cathodic arc deposition,” Diamond and Related Materials, vol. 17, no. 1, pp. 36–42, 2008. View at Publisher · View at Google Scholar · View at Scopus
  22. N. Ali, V. F. Neto, S. Mei et al., “Optimisation of the new time-modulated CVD process using the Taguchi method,” Thin Solid Films, vol. 469-470, pp. 154–160, 2004. View at Publisher · View at Google Scholar · View at Scopus
  23. T. Y. Leung, W. F. Man, P. K. Lim, W. C. Chan, F. Gaspari, and S. Zukotynski, “Determination of the sp3/sp2 ratio of a-C:H by XPS and XAES,” Journal of Non-Crystalline Solids, vol. 254, no. 1–3, pp. 156–160, 1999. View at Publisher · View at Google Scholar · View at Scopus
  24. J. Filik, P. W. May, S. R. J. Pearce, R. K. Wild, and K. R. Hallam, “XPS and laser Raman analysis of hydrogenated amorphous carbon films,” Diamond and Related Materials, vol. 12, no. 3–7, pp. 974–978, 2003. View at Publisher · View at Google Scholar · View at Scopus
  25. Z. G. Lu and C. Y. Chung, “Electrochemical characterization of diamond like carbon thin films,” Diamond and Related Materials, vol. 17, no. 11, pp. 1871–1876, 2008. View at Publisher · View at Google Scholar · View at Scopus
  26. J. B. Wu, J. J. Chang, M. Y. Li, M. S. Leu, and A. K. Li, “Characterization of diamond-like carbon coatings prepared by pulsed bias cathodic vacuum arc deposition,” Thin Solid Films, vol. 516, no. 2–4, pp. 243–247, 2007. View at Publisher · View at Google Scholar · View at Scopus
  27. K. Bewilogua, C. V. Cooper, C. Specht, J. Schröder, R. Wittorf, and M. Grischke, “Effect of target material on deposition and properties of metal-containing DLC (Me-DLC) coatings,” Surface and Coatings Technology, vol. 127, no. 2-3, pp. 224–232, 2000. View at Google Scholar · View at Scopus
  28. C. M. Chuang, M. C. Wu, W. F. Su, K. C. Cheng, and Y. F. Chen, “High intensity fluorescence of photoactivated silver oxide from composite thin film with periodic array structure,” Applied Physics Letters, vol. 89, no. 6, Article ID 061912, 2006. View at Publisher · View at Google Scholar · View at Scopus
  29. X. Z. Che, L. H. Chen, H. T. Ma, and H. X. Fang, “Effect of thickness on structures of ultrathin diamond-like carbon films,” Chinese Science Bulletin, vol. 55, no. 18, pp. 1949–1951, 2010. View at Publisher · View at Google Scholar · View at Scopus
  30. R. Maheswaran, R. Sivaraman, O. Mahapatra, P. C. Rao, C. Gopalakrishnan, and D. J. Thiruvadigal, “Surface studies of diamond-like carbon films grown by plasma-enhanced chemical vapor deposition,” Surface and Interface Analysis, vol. 42, no. 12-13, pp. 1702–1705, 2010. View at Publisher · View at Google Scholar · View at Scopus
  31. J. Robertson, “Diamond-like amorphous carbon,” Materials Science and Engineering R, vol. 37, pp. 129–281, 2002. View at Google Scholar
  32. Y. Zhou, B. Wang, X. Song et al., “Control over the wettability of amorphous carbon films in a large range from hydrophilicity to super-hydrophobicity,” Applied Surface Science, vol. 253, no. 5, pp. 2690–2694, 2006. View at Publisher · View at Google Scholar · View at Scopus
  33. R. Paul, S. N. Das, S. Dalui et al., “Synthesis of DLC films with different sp2/sp3 ratios and their hydrophobic behaviour,” Journal of Physics D, vol. 41, no. 5, Article ID 055309, 2008. View at Publisher · View at Google Scholar · View at Scopus