Fabrication of High Transparency Diamond-Like Carbon Film Coating on D263T Glass at Room Temperature as an Antireflection Layer

Table 1

The design of the experiment defines the deposition parameters of DLC films for each factor and level.

Symbol	Factor	Level 1	Level 2	Level 3
A	RF power (W)	150	175	200
B	Working distance (cm)	8	9	10
C	Sputtering pressure (mTorr)	1	3	5
D	Deposition time (h)	0.5	1	2