Fabrication of High Transparency Diamond-Like Carbon Film Coating on D263T Glass at Room Temperature as an Antireflection Layer

Table 2

Design of experiments (DOE) according to L₉ (3⁴) orthogonal array.

Specimen; (GD)	Control factors
	RF power; (W)	Working distance; (cm)	Sputtering pressure; (mTorr)	Deposition time; (h)
1	150	8	1	0.5
2	150	9	3	1
3	150	10	5	2
4	175	8	3	2
5	175	9	5	0.5
6	175	10	1	1
7	200	8	5	1
8	200	9	1	2
9	200	10	3	0.5