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International Journal of Photoenergy
Volume 2013, Article ID 698026, 6 pages
http://dx.doi.org/10.1155/2013/698026
Research Article

Simulation and Experimental Study of Photogeneration and Recombination in Amorphous-Like Silicon Thin Films Deposited by 27.12 MHz Plasma-Enhanced Chemical Vapor Deposition

1Graduate Institute of Precision Engineering, National Chung Hsing University, Taichung 402, Taiwan
2Department of Materials Science and Engineering, MingDao University, Changhua 52345, Taiwan

Received 22 November 2012; Revised 3 May 2013; Accepted 16 May 2013

Academic Editor: Peter Rupnowski

Copyright © 2013 Chia-Hsun Hsu et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Chia-Hsun Hsu, In-Cha Hsieh, Chia-Chi Tsou, and Shui-Yang Lien, “Simulation and Experimental Study of Photogeneration and Recombination in Amorphous-Like Silicon Thin Films Deposited by 27.12 MHz Plasma-Enhanced Chemical Vapor Deposition,” International Journal of Photoenergy, vol. 2013, Article ID 698026, 6 pages, 2013. https://doi.org/10.1155/2013/698026.