Vapour-Phase and Solid-Phase Epitaxy of Silicon on Solid-Phase Crystallised Seed Layers for Solar Cells Application

Figure 2

(a) and (b) XTEM bright- and dark-field images of the VPE grown sample on the SPC seed, respectively; (c) and (d) XTEM bright- and dark-field images of the SPE grown sample on the SPC seed layer, respectively; (e), (f), and (g) SAED pattern of the circled areas “A” and “B” in (b) and “C” in (d), respectively.

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(b)

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