Vapour-Phase and Solid-Phase Epitaxy of Silicon on Solid-Phase Crystallised Seed Layers for Solar Cells Application

Table 1

XRD peak FWHM and Raman peak FWHM of the VPE and SPE grown poly-Si epilayer.

Method	Peak	VPE	SPE
XRD peak FWHM (°)	(111)	0.35	0.33
	(220)	0.36	0.33
	(311)	0.38	0.35
	(400)	0.36	0.34
Raman peak FWHM (cm^−1)		6.03±0.10	5.65±0.05