Love Wave Ultraviolet Photodetector Fabricated on a TiO₂/ST-Cut Quartz Structure

Table 1

The root mean square values and phase velocities of TiO₂ thin films deposited on quartz substrate with various thicknesses.

Thickness; (𝜇m)	Root mean square value; (nm)	Phase velocity; (m/s)
0.50	0.47	4907
0.85	2.84	4814
1.35	3.34	4787
1.60	5.87	4725
2.50	10.81	4356