Growth and Properties of ZnO:Al on Textured Glass for Thin Film Solar Cells

Table 1

Surface roughness (), resistivity (), sheet resistance (), integrated transmittance (400–800 nm), haze at 600 nm, and figure of merit values () of the AZO layers deposited on smooth and textured glass along with that of Asahi-U substrate.

Sample	(nm)	(·cm)	()	Integrated (%)	Haze at 600 nm (%)	()
AZO1 (500 nm)	5		11.2	84.5	—	16.5
AZO2 (700 nm)	7		8.4	84.5	—	22.1
AZO3 (1000 nm)	9		5.3	81.8	—	25.4
E + AZO1	66		14.2	84.5	13.7	13
E + AZO2	58		9.8	84.5	10.7	19
E + AZO3	67		7	81.6	14.1	18.8
S + AZO1	126		23	75.5	43.7	2.6
S + AZO2	80		16.5	75.9	32.5	3.8
S + AZO3	92		9.5	73.5	33.1	4.9
Asahi-U	25	—	9.3	78.3	10.1	9.4